ISOCHRONAL ANNEALING OF LOCAL VIBRATIONAL-MODES IN PROTON-IMPLANTED AND DEUTERON-IMPLANTED INP

We have performed isochronal annealing experiments on the hydrogen-related local vibrational modes (LVMs) created by proton and deuteron implantation of InP. Implanted samples were annealed in 50-degrees-C increments in the 200-600-degrees-C temperature range for 30 min each and then measured by infrared absorption. A group of four different LVMs is observed, each of which arises from the hydrogen-phosphorus stretching vibration with different defects or impurities at nearest-neighbor sites. Each LVM exhibits an annealing behavior that is different than any of the other LVMs. The annealing results are shown arid discussed in relation to the possible microscopic structure of the defect responsible for each LVM.