DESIGN AND OPERATION OF ETA, AN AUTOMATED ELLIPSOMETER

被引：147

作者：

HAUGE, PS ^{[1
]}

DILL, FH ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

关键词：

D O I：

10.1147/rd.176.0472

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：472 / 489

页数：18

共 13 条

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