MODEL FOR NON-EQUILIBRIUM SEGREGATION DURING PULSED LASER ANNEALING

被引：78

作者：

WOOD, RF

机构：

来源：

关键词：

D O I：

10.1063/1.91914

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：302 / 304

页数：3

共 15 条

[1] ARSENIC DIFFUSION IN SILICON MELTED BY HIGH-POWER NANOSECOND LASER PULSING
BAERI, P
CAMPISANO, SU
FOTI, G
RIMINI, E
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (02) : 137 - 140
[2] SOLUTE TRAPPING BY RAPID SOLIDIFICATION
BAKER, JC
CAHN, JW
[J]. ACTA METALLURGICA, 1969, 17 (05): : 575 - &
[3] CHALMERS B, 1954, T AM I MIN MET ENG, V200, P519
[4] KINETICS OF ALLOY SOLIDIFICATION
JACKSON, KA
[J]. CANADIAN JOURNAL OF PHYSICS, 1958, 36 (06) : 683 - 691
[5] JACKSON KA, 1979, LASER SOLID INTERACT, P102
[6] KHAIBULLIN IB, 1977, SOV PHYS SEMICOND+, V11, P190
[7] Kodera H., 1963, JAP J APPL PHYS, V2, P212, DOI [10.1143/JJAP.2.212, DOI 10.1143/JJAP.2.212]
[8] Sharma B.L., 1970, DIFFUSION SEMICONDUC
[9] A MATHEMATICAL ANALYSIS OF SOLUTE REDISTRIBUTION DURING SOLIDIFICATION
SMITH, VG
TILLER, WA
RUTTER, JW
[J]. CANADIAN JOURNAL OF PHYSICS, 1955, 33 (12) : 723 - 745
[10] THURMOND CD, 1959, SEMICONDUCTORS, P145