INTRINSIC STRESS IN THIN-FILMS OF AG, AL, ZNS AND LIF

被引:12
作者
LAUGIER, M [1 ]
机构
[1] UNIV AIX MARSEILLE,CTR ST JEROME,ELECTROTECH LAB,F-13397 MARSEILLE,FRANCE
关键词
D O I
10.1007/BF00551803
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:1147 / 1152
页数:6
相关论文
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