DEPENDENCE OF THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF ULTRATHIN COBALT SILICIDE FILMS ON FORMATION CONDITIONS

被引：17

作者：

PHILLIPS, JM ^{[1
]}

BATSTONE, JL ^{[1
]}

HENSEL, JC ^{[1
]}

CERULLO, M ^{[1
]}

UNTERWALD, FC ^{[1
]}

机构：

[1] UNIV LIVERPOOL,DEPT MAT SCI & ENGN,LIVERPOOL L69 3BX,ENGLAND

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 01期

关键词：

D O I：

10.1557/JMR.1989.0144

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：144 / 155

页数：12

共 21 条

[1] ELECTRICAL TRANSPORT-PROPERTIES IN CO-SILICIDES FORMED BY THIN-FILM REACTIONS [J].

APRILESI, G ;

MAZZEGA, E ;

MICHELINI, M ;

NAVA, F ;

QUEIROLO, G ;

MEDA, L .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) :310-317

[2]

BATSTONE JL, 1987, MATER RES SOC S P, V91, P445

[3] HIGH-RESOLUTION PHOTOEMISSION-STUDY OF CO/SI(111) INTERFACE FORMATION [J].

BOSCHERINI, F ;

JOYCE, JJ ;

RUCKMAN, MW ;

WEAVER, JH .

PHYSICAL REVIEW B, 1987, 35 (09) :4216-4220

[4] STRUCTURE AND NUCLEATION MECHANISM OF NICKEL SILICIDE ON SI(111) DERIVED FROM SURFACE EXTENDED-X-RAY-ABSORPTION FINE-STRUCTURE [J].

COMIN, F ;

ROWE, JE ;

CITRIN, PH .

PHYSICAL REVIEW LETTERS, 1983, 51 (26) :2402-2405

[5] KINETICS OF FORMATION AND PROPERTIES OF EPITAXIAL COSI2 FILMS ON SI (111) [J].

DAVITAYA, FA ;

DELAGE, S ;

ROSENCHER, E ;

DERRIEN, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02) :770-773

[6] METAL-INSULATOR-TRANSITION IN DISORDERED GERMANIUM-GOLD ALLOYS [J].

DODSON, BW ;

MCMILLAN, WL ;

MOCHEL, JM ;

DYNES, RC .

PHYSICAL REVIEW LETTERS, 1981, 46 (01) :46-49

[7] INSITU STUDY OF THE MOLECULAR-BEAM EPITAXY OF COSI2 ON (111) SI BY TRANSMISSION ELECTRON-MICROSCOPY AND DIFFRACTION [J].

GIBSON, JM ;

BATSTONE, JL ;

TUNG, RT .

APPLIED PHYSICS LETTERS, 1987, 51 (01) :45-47

[8] ORIGIN OF A-TYPE OR B-TYPE NISI2 DETERMINED BY INSITU TRANSMISSION ELECTRON-MICROSCOPY AND DIFFRACTION DURING GROWTH [J].

GIBSON, JM ;

BATSTONE, JL ;

TUNG, RT ;

UNTERWALD, FC .

PHYSICAL REVIEW LETTERS, 1988, 60 (12) :1158-1161

[9]

HELLMAN F, UNPUB PHYS REV B

[10] EFFECTS OF ION-BOMBARDMENT ON TRANSPORT-PROPERTIES OF THIN-FILMS OF COSI2 AND NISI2 [J].

HENSEL, JC ;

TUNG, RT ;

POATE, JM ;

UNTERWALD, FC .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :409-412

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