DISSOCIATIVE ADSORPTION OF PH3 ON SI(111)-(7 X 7) - A HIGH-RESOLUTION ELECTRON-ENERGY LOSS SPECTROSCOPY STUDY

被引：20

作者：

CHEN, PJ ^{[1
]}

COLAIANNI, ML ^{[1
]}

WALLACE, RM ^{[1
]}

YATES, JT ^{[1
]}

机构：

[1] UNIV PITTSBURGH,CTR SURFACE SCI,DEPT CHEM,PITTSBURGH,PA 15260

来源：

SURFACE SCIENCE | 1991年 / 244卷 / 03期

关键词：

D O I：

10.1016/0039-6028(91)90491-A

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Dissociative adsorption of PH3 on Si(111)-(7 x 7) has been observed at 80 K. The Si-H species is observed to be produced upon PH3 adsorption. Depending upon the PH3 surface coverage, PH3(a) (minority species) and PH2(a) species are found on the surface. The thermal dissociation of the surface PH2 species occurs between 450 and 500 K, resulting in the capture of hydrogen and phosphorus on the surface.

引用

页码：177 / 184

页数：8

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