LOW-NOISE AUTOMATED MEASUREMENT SYSTEM FOR LOW-FREQUENCY CURRENT FLUCTUATIONS IN THIN-OXIDE SILICON STRUCTURES

被引:6
作者
SALETTI, R [1 ]
NERI, B [1 ]
机构
[1] UNIV PISA,DIPARTIMENTO INGN INFORMAZ ELETTR INFORMAT TELECOMUN,I-56126 PISA,ITALY
关键词
D O I
10.1109/19.126645
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes the design of an automated system for low-noise measurement of low-frequency current fluctuations in thin-oxide silicon devices. The aim of these measurements is to study the current tunneling through the oxide, and to investigate its correlation with the oxide breakdown. The dedicated system is realized by integrating a personal computer commercial acquisition board with custom designed low-noise preamplifiers.
引用
收藏
页码:123 / 127
页数:5
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