DEFECTS IN LASER DAMAGED SILICON OBSERVED BY DLTS

被引：43

作者：

MOONEY, PM

YOUNG, RT

KARINS, J

LEE, YH

CORBETT, JW

机构：

[1] SUNY ALBANY,DEPT PHYS,INST STUDY DEFECTS SOLIDS,ALBANY,NY 12222

[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 48卷 / 01期

关键词：

D O I：

10.1002/pssa.2210480144

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：K31 / K34

页数：4

共 13 条

[1] QUENCHED-IN DEFECT IN BORON-DOPED SILICON [J].

GERSON, JD ;

CHENG, LJ ;

CORBETT, JW .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (11) :4821-4822

[2]

GUILIANI JF, 1974, J APPL PHYS, V45, P4993

[3] LASER (CW-CO2)-INDUCED ELECTRICAL DAMAGE IN GE AND SI [J].

GULATI, SK ;

GRANNEMANN, WW .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (07) :3024-3027

[4]

Ivanov L.I., 1975, SOV PHYS JETP, V40, P75

[5] LASER DAMAGE IN SILICON PHOTODIODES [J].

KRUER, M ;

ALLEN, R ;

ESTEROWITZ, L ;

BARTOLI, F .

OPTICAL AND QUANTUM ELECTRONICS, 1976, 8 (05) :453-458

[6] DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J].

LANG, DV .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3023-3032

[7]

LEE YH, 1977, APPL PHYS LETT, V31, P142, DOI 10.1063/1.89630

[8] NORMAL LASER DAMAGE OF SILICON SOLAR CELLS WITHOUT PHASE-CHANGE [J].

MATSUOKA, Y ;

USAMI, A .

APPLIED PHYSICS LETTERS, 1974, 25 (10) :574-576

[9] LASER DAMAGE TO COPPER-DOPED AND UNDOPED SILICON SOLAR CELLS [J].

MATSUOKA, Y ;

USAMI, A .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (09) :1259-&

[10]

Wang J.-X., COMMUNICATION

← 1 2 →