PROJECTILE-ENERGY DEPENDENCE OF COMPOSITIONAL CHANGES PRODUCED IN SPUTTERING OF A DILUTE SI(FE,W) ALLOY

被引:6
作者
WITTMAACK, K
BLANK, P
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1980年 / 170卷 / 1-3期
关键词
D O I
10.1016/0029-554X(80)91035-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:331 / 335
页数:5
相关论文
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