MICROSTRUCTURE OF POROUS SILICON

被引：30

作者：

NAKAJIMA, A

OHSHIMA, Y

ITAKURA, T

GOTO, Y

机构：

[1] Fujitsu Laboratories Ltd., Atsugi 243-01

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 21期

关键词：

D O I：

10.1063/1.109268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We examined the microstructure of luminescent porous silicon by cross-sectional high-resolution transmission electron microscopy and found a threadlike structure consisting of Si microcrystals. We also found Si microcrystals with sizes ranging about 3-20 nm randomly distributed throughout the porous silicon.

引用

页码：2631 / 2633

页数：3

共 7 条

[1] SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS
CANHAM, LT
[J]. APPLIED PHYSICS LETTERS, 1990, 57 (10) : 1046 - 1048
[2] MICROSTRUCTURE OF VISIBLY LUMINESCENT POROUS SILICON
COLE, MW
HARVEY, JF
LUX, RA
ECKART, DW
TSU, R
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (22) : 2800 - 2802
[3] CULIS AG, 1991, NATURE, V353, P335
[4] EVIDENCE FOR QUANTUM CONFINEMENT IN THE PHOTOLUMINESCENCE OF POROUS SI AND SIGE
GARDELIS, S
RIMMER, JS
DAWSON, P
HAMILTON, B
KUBIAK, RA
WHALL, TE
PARKER, EHC
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (17) : 2118 - 2120
[5] INTENSE PHOTOLUMINESCENCE FROM LATERALLY ANODIZED POROUS SI
JUNG, KH
SHIH, S
HSIEH, TY
KWONG, DL
LIN, TL
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (25) : 3264 - 3266
[6] PHOTOLUMINESCENCE OF POROUS SI, OXIDIZED THEN DEOXIDIZED CHEMICALLY
NAKAJIMA, A
ITAKURA, T
WATANABE, S
NAKAYAMA, N
[J]. APPLIED PHYSICS LETTERS, 1992, 61 (01) : 46 - 48
[7] MICROSTRUCTURE OF VISIBLE-LIGHT EMITTING POROUS SILICON
NISHIDA, A
NAKAGAWA, K
KAKIBAYASHI, H
SHIMADA, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (9A): : L1219 - L1222

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