ELECTROPOLISHING SILICON IN HYDROFLUORIC ACID SOLUTIONS

被引：606

作者：

TURNER, DR

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1958年 / 105卷 / 07期

关键词：

D O I：

10.1149/1.2428873

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

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页码：402 / 408

页数：7

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