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MINORITY-CARRIER LIFETIME MAPPING IN SILICON USING A MICROPROCESSOR-CONTROLLED FLYING-SPOT SCANNER

被引：4
作者：
NORDLANDER, E
DRUGGE, B
TAPIA, M
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1985年 / 18卷 / 01期
关键词：
D O I：
10.1088/0022-3735/18/1/017
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：65 / 68
页数：4
相关论文
共 5 条
[1]   LASER SCANNING TECHNIQUE FOR THE DETECTION OF MINORITY-CARRIER LIFETIME INHOMOGENEITIES IN SILICON USING LIQUID RECTIFYING CONTACTS [J].
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PHYSICA SCRIPTA, 1981, 24 (02) :392-395
[2]   LASER SCANNING TECHNIQUE FOR THE DETECTION OF RESISTIVITY INHOMOGENEITIES IN SILICON USING LIQUID RECTIFYING CONTACTS [J].
DRUGGE, B ;
NORDLANDER, E .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (11) :2124-2127
[3]   LASER SCANNING TECHNIQUE FOR THE DETECTION OF RESISTIVITY AND LIFETIME INHOMOGENEITIES IN SEMICONDUCTOR-DEVICES [J].
ENGSTROM, O ;
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TOVE, PA .
PHYSICA SCRIPTA, 1978, 18 (06) :357-363
[4]  
ENGSTROM O, 1980, ASTM STP AM SOC TEST, V712, P239
[5]   A MU-P-CONTROLLED FLYING-SPOT SCANNER WITH AN INTELLIGENT A/D-CONVERTER UNIT [J].
TAPIA, M ;
NORDLANDER, E ;
DRUGGE, B .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1983, 32 (04) :491-496
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