DIAMOND SYNTHESIS SUPPRESSING THE THERMAL-DECOMPOSITION OF METHANE IN A HOT-FILAMENT CVD

被引：10

作者：

AIKYO, H

KONDO, KI

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 09期

关键词：

D O I：

10.1143/JJAP.28.L1631

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1631 / L1633

页数：3

共 11 条

[1] THERMAL-DECOMPOSITION OF METHANE .1. KINETICS OF PRIMARY DECOMPOSITION TO C2H6 + H2 - RATE CONSTANT FOR HOMOGENEOUS UNIMOLECULAR DISSOCIATION OF METHANE AND ITS PRESSURE-DEPENDENCE
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[2] SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS
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[3] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA
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SATO, Y
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[J]. JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) : 642 - 644
[4] EFFECTS OF OXYGEN ON CVD DIAMOND SYNTHESIS
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[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09): : 1429 - 1432
[5] HIGH-RATE SYNTHESIS OF DIAMOND BY DC PLASMA-JET CHEMICAL VAPOR-DEPOSITION
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[J]. APPLIED PHYSICS LETTERS, 1988, 52 (06) : 437 - 438
[6] GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS
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[J]. JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) : 3106 - 3112
[7] SYNTHESIS OF DIAMOND FILMS IN A RF INDUCTION THERMAL PLASMA
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HINO, M
KOBAYASHI, T
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (10) : 737 - 739
[8] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
MATSUMOTO, S
SATO, Y
KAMO, M
SETAKA, N
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
[9] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON ASSISTED CHEMICAL VAPOR-DEPOSITION
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INUZUKA, T
[J]. APPLIED PHYSICS LETTERS, 1985, 46 (02) : 146 - 147
[10] SHOCK TUBE STUDIES ON THE PYROLYSIS AND OXIDATION OF METHANE
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[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1959, 63 (10) : 1736 - 1742

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