ADSORPTION-KINETICS OF SIH4, SI2H6 AND SI3H8 ON THE SI(111)-(7X7) SURFACE

被引：225

作者：

GATES, SM

机构：

来源：

SURFACE SCIENCE | 1988年 / 195卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(88)90798-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：307 / 329

页数：23

共 27 条

[1] PHOTOELECTRON-SPECTRA AND MOLECULAR-PROPERTIES .51. IONIZATION-POTENTIALS OF SILANES SINH2N+2 [J].

BOCK, H ;

ENSSLIN, W ;

FEHER, F ;

FREUND, R .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1976, 98 (03) :668-674

[2]

BUSS R, COMMUNICATION

[3] DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS [J].

CAMPBELL, CT ;

VALONE, SM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :408-411

[4] HYDROGEN ADSORPTION ON SI(111)-(7X7) [J].

CULBERTSON, RJ ;

FELDMAN, LC ;

SILVERMAN, PJ ;

HAIGHT, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :868-871

[5] THE SURFACE-CHEMISTRY OF THE THERMAL-CRACKING OF SILANE ON SILICON (111) [J].

FARNAAM, MK ;

OLANDER, DR .

SURFACE SCIENCE, 1984, 145 (2-3) :390-406

[6] KINETICS OF SILICON DEPOSITION ON SILICON BY PYROLYSIS OF SILANE - MASS-SPECTROMETRIC INVESTIGATION BY MOLECULAR-BEAM SAMPLING [J].

FARROW, RFC .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (07) :899-907

[7]

GATES SJ, UNPUB

[8] OBSERVATION OF A DEUTERIUM KINETIC ISOTOPE EFFECT IN THE CHEMISORPTION AND REACTION OF METHANOL ON NI(111) [J].

GATES, SM ;

RUSSELL, JN ;

YATES, JT .

SURFACE SCIENCE, 1984, 146 (01) :199-210

[9]

GATES SM, 1986, SURFACE SCI, V174, P111

[10] SURFACE ELECTRONIC-STRUCTURE OF SI(111)-(7 X 7) RESOLVED IN REAL SPACE [J].

HAMERS, RJ ;

TROMP, RM ;

DEMUTH, JE .

PHYSICAL REVIEW LETTERS, 1986, 56 (18) :1972-1975

← 1 2 3 →