ADSORPTION-KINETICS OF SIH4, SI2H6 AND SI3H8 ON THE SI(111)-(7X7) SURFACE

被引：225

作者：

GATES, SM

机构：

来源：

SURFACE SCIENCE | 1988年 / 195卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(88)90798-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：307 / 329

页数：23

共 27 条

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