CRACK FORMATION AND THERMAL-STRESS RELAXATION OF GAAS ON SI GROWTH BY METALORGANIC VAPOR-PHASE EPITAXY

被引:14
作者
ACKAERT, A
BUYDENS, L
LOOTENS, D
VANDAELE, P
DEMEESTER, P
机构
关键词
D O I
10.1063/1.102056
中图分类号
O59 [应用物理学];
学科分类号
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页码:2187 / 2189
页数:3
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