MULTIPHOTON-IONIZATION MASS-SPECTROMETRIC DETECTION OF GALLIUM ATOM DURING THE TRIMETHYLGALLIUM CVD REACTION

被引：23

作者：

SQUIRE, DW

DULCEY, CS

LIN, MC

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1986年 / 131卷 / 1-2期

关键词：

D O I：

10.1016/0009-2614(86)80527-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：112 / 117

页数：6

共 14 条

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[8] FORMATION OF CH3 RADICALS IN THE DECOMPOSITION OF TRIMETHYL ALUMINUM ON HOT SOLID-SURFACES [J].

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