ATOMIC-SCALE FRICTION MEASUREMENTS USING FRICTION FORCE MICROSCOPY .1. GENERAL-PRINCIPLES AND NEW MEASUREMENT TECHNIQUES

被引:270
作者
RUAN, JA
BHUSHAN, B
机构
[1] Computer Microtribology and Contamination Laboratory, Department of Mechanical Engineering, Ohio State University, Columbus, OH
来源
JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME | 1994年 / 116卷 / 02期
关键词
D O I
10.1115/1.2927240
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Friction force measurements using modified atomic force microscopy, called here Friction Force Microscopy (FFM), are becoming increasingly important in the understanding of fundamental mechanisms of friction, wear, and lubrication, and to study interfacial phenomena in micro- and nanostructures used in magnetic storage systems and Microelectromechanical Systems (MEMS). FFMs can be used to study engineering surfaces in dry or wet conditions. A review of existing designs of FFMs and methods of friction force measurements is presented. In terms of friction force measurements, there are important issues related to the basic operation and calibration of these instruments which have not been fully studied. A new method of measuring friction fore using a commercial FFM and a calibration procedure for con version of measured data to normal and friction forces are presented. Micro-scale friction data of selected materials are presented and discussed in light of macro-friction measurements.
引用
收藏
页码:378 / 388
页数:11
相关论文
共 43 条
[21]  
KANEKO R, 1992, 1ST P INT WORKSH MIC
[22]  
KANEKO R, 1991, ADV INFO STORAGE SYS, V1, P267
[23]  
Maivald P., 1991, Nanotechnology, V2, P103, DOI 10.1088/0957-4484/2/2/004
[24]   ATOMIC-RESOLUTION ELECTROCHEMISTRY WITH THE ATOMIC FORCE MICROSCOPE - COPPER DEPOSITION ON GOLD [J].
MANNE, S ;
HANSMA, PK ;
MASSIE, J ;
ELINGS, VB ;
GEWIRTH, AA .
SCIENCE, 1991, 251 (4990) :183-186
[25]   ATOMIC FORCE MICROSCOPY OF LIQUID-COVERED SURFACES - ATOMIC RESOLUTION IMAGES [J].
MARTI, O ;
DRAKE, B ;
HANSMA, PK .
APPLIED PHYSICS LETTERS, 1987, 51 (07) :484-486
[26]   MAGNETIC IMAGING BY FORCE MICROSCOPY WITH 1000-A RESOLUTION [J].
MARTIN, Y ;
WICKRAMASINGHE, HK .
APPLIED PHYSICS LETTERS, 1987, 50 (20) :1455-1457
[27]   ATOMIC FORCE MICROSCOPY OF POLYMERIC LIQUID-FILMS [J].
MATE, CM ;
LORENZ, MR ;
NOVOTNY, VJ .
JOURNAL OF CHEMICAL PHYSICS, 1989, 90 (12) :7550-7555
[28]   ATOMIC-SCALE FRICTION OF A TUNGSTEN TIP ON A GRAPHITE SURFACE [J].
MATE, CM ;
MCCLELLAND, GM ;
ERLANDSSON, R ;
CHIANG, S .
PHYSICAL REVIEW LETTERS, 1987, 59 (17) :1942-1945
[29]   THE ART AND SCIENCE AND OTHER ASPECTS OF MAKING SHARP TIPS [J].
MELMED, AJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :601-608
[30]   FRICTION FORCE MICROSCOPY OF MIXED LANGMUIR-BLODGETT-FILMS [J].
MEYER, E ;
OVERNEY, R ;
LUTHI, R ;
BRODBECK, D ;
HOWALD, L ;
FROMMER, J ;
GUNTHERODT, HJ ;
WOLTER, O ;
FUJIHIRA, M ;
TAKANO, H ;
GOTOH, Y .
THIN SOLID FILMS, 1992, 220 (1-2) :132-137