DC CONDUCTION MECHANISMS IN THIN POLYIMIDE FILMS

被引：21

作者：

NEVIN, JH

SUMME, GL

机构：

来源：

MICROELECTRONICS AND RELIABILITY | 1981年 / 21卷 / 05期

关键词：

D O I：

10.1016/0026-2714(81)90061-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：699 / 705

页数：7

共 11 条

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[3] UNIFORMITY OF THIN-FILMS - NEW TECHNIQUE APPLIED TO POLYIMIDES
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[7] NEW TRANSISTOR WITH 2-LEVEL METAL-ELECTRODES
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[8] NOVEL PLANAR MULTILEVEL INTERCONNECTION TECHNOLOGY UTILIZING POLYIMIDE
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[9] ELECTRICAL-CONDUCTION OF POLYPYROMELLITIMIDE FILMS AT TEMPERATURES OF 120-DEGREES-C-180-DEGREES-C
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IEDA, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (03) : 453 - 458
[10] SHAH P, 1979, 1979 P INT C EL DISC, P465