THE MICROSTRUCTURE AND ELECTRICAL-PROPERTIES OF CONTACTS FORMED IN THE NI/AL/SI SYSTEM DUE TO RAPID THERMAL-PROCESSING

被引：6

作者：

KATZ, A

KOMEM, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 11期

关键词：

D O I：

10.1063/1.340329

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5526 / 5533

页数：8

共 23 条

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