METAL-SILICON INTERFACE FORMATION - THE NI-SI AND PD-SI SYSTEMS

被引:113
作者
GRUNTHANER, PJ
GRUNTHANER, FJ
MADHUKAR, A
MAYER, JW
机构
[1] UNIV SO CALIF, LOS ANGELES, CA 90007 USA
[2] CORNELL UNIV, ITHACA, NY 14853 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期
关键词
D O I
10.1116/1.571079
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:649 / 656
页数:8
相关论文
共 31 条
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