ISOLATING SURFACE LAYERS ON METALLIC CONDUCTORS PRODUCED BY ION BOMBARDMENT

被引：8

作者：

BALARIN, M

OTTO, G

STORBECK, I

SCHENK, M

WAGNER, H

机构：

来源：

THIN SOLID FILMS | 1969年 / 4卷 / 04期

关键词：

D O I：

10.1016/0040-6090(69)90071-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Isolating surface layers were formed on different metals and on silicon by means of bombardment with ionized oxygen and air, respectively. The production of these layers is described, and the electrical properties are reported. Furthermore the advantages of this procedure are discussed, and possibilities for the application of this effect are shown, particularly for the production of microelectronic devices. © 1969.

引用

页码：255 / &

共 12 条

[1] INFRARED SPECTROSCOPY OF SURFACE COATINGS IN REFLECTED LIGHT [J].