ION-BEAM DEPOSITION OF BETA-SIC LAYERS ONTO ALPHA-SIC SUBSTRATES

被引：12

作者：

WITHROW, SP

MORE, KL

ZUHR, RA

HAYNES, TE

机构：

来源：

VACUUM | 1989年 / 39卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(89)91094-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1065 / 1068

页数：4

共 18 条

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[2]

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[5]

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