HETEROEPITAXY OF GAAS ON SI AND GE USING ALTERNATING, LOW-ENERGY ION-BEAMS

被引：20

作者：

HAYNES, TE

ZUHR, RA

PENNYCOOK, SJ

APPLETON, BR

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 15期

关键词：

D O I：

10.1063/1.100690

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1439 / 1441

页数：3

共 11 条

[1] LOW-TEMPERATURE EPITAXIAL-GROWTH OF SI AND GE AND FABRICATION OF ISOTOPIC HETEROSTRUCTURES BY DIRECT ION-BEAM DEPOSITION [J].

APPLETON, BR ;

PENNYCOOK, SJ ;

ZUHR, RA ;

HERBOTS, N ;

NOGGLE, TS .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :975-982

[2]

HAYNES TE, 1989, J VAC SCI TECHNOL A

[3]

HERBOTS N, 1988, 1988 SPRING M MAT RE

[4] GROWTH MECHANISMS OF MOLECULAR-BEAM EPITAXY OF INP AND GAASXP1-X USING A LOW-ENERGY P+ ION-BEAM [J].

MARUNO, S ;

MORISHITA, Y ;

ISU, T ;

NOMURA, Y ;

OGATA, H .

SURFACE SCIENCE, 1988, 201 (1-2) :335-344

[5] GERMANIUM AND SILICON ION-BEAM DEPOSITION [J].

MIYAKE, K ;

TOKUYAMA, T .

THIN SOLID FILMS, 1982, 92 (1-2) :123-129

[6] MOLECULAR-BEAM EPITAXY OF GAAS USING A MASS-SEPARATED, LOW-ENERGY AS+ ION-BEAM [J].

SHIMIZU, S ;

TSUKAKOSHI, O ;

KOMIYA, S ;

MAKITA, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (02) :554-559

[7] LOW-ENERGY MASS-SEPARATED ION-BEAM DEPOSITION OF MATERIALS [J].

TOKUYAMA, T ;

YAGI, K ;

MIYAKE, K ;

TAMURA, M ;

NATSUAKI, N ;

TACHI, S .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :241-250

[8] GERMANIUM AND SILICON FILM GROWTH BY LOW-ENERGY ION-BEAM DEPOSITION [J].

YAGI, K ;

TAMURA, S ;

TOKUYAMA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (02) :245-251

[9] ION-BEAM EPITAXY OF SILICON ON GE AND SI AT TEMPERATURES OF 400-K [J].

ZALM, PC ;

BECKERS, LJ .

APPLIED PHYSICS LETTERS, 1982, 41 (02) :167-169

[10] LOW-TEMPERATURE EPITAXY OF SI AND GE BY DIRECT ION-BEAM DEPOSITION [J].

ZUHR, RA ;

APPLETON, BR ;

HERBOTS, N ;

LARSON, BC ;

NOGGLE, TS ;

PENNYCOOK, SJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :2135-2139

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