共 11 条
[2]
HAYNES TE, 1989, J VAC SCI TECHNOL A
[3]
HERBOTS N, 1988, 1988 SPRING M MAT RE
[6]
MOLECULAR-BEAM EPITAXY OF GAAS USING A MASS-SEPARATED, LOW-ENERGY AS+ ION-BEAM
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1985, 3 (02)
:554-559
[7]
LOW-ENERGY MASS-SEPARATED ION-BEAM DEPOSITION OF MATERIALS
[J].
NUCLEAR INSTRUMENTS & METHODS,
1981, 182 (APR)
:241-250
[10]
LOW-TEMPERATURE EPITAXY OF SI AND GE BY DIRECT ION-BEAM DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (04)
:2135-2139