GROWTH MECHANISMS OF MOLECULAR-BEAM EPITAXY OF INP AND GAASXP1-X USING A LOW-ENERGY P+ ION-BEAM

被引:2
作者
MARUNO, S
MORISHITA, Y
ISU, T
NOMURA, Y
OGATA, H
机构
关键词
D O I
10.1016/0039-6028(88)90616-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:335 / 344
页数:10
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共 11 条
[1]   MECHANISMS OF EPITAXIAL GAAS CRYSTAL-GROWTH BY SPUTTER DEPOSITION - ROLE OF ION SURFACE INTERACTIONS [J].
BARNETT, SA ;
GREENE, JE .
SURFACE SCIENCE, 1983, 128 (2-3) :401-416
[2]   COMPOSITION EFFECTS IN THE GROWTH OF GA(IN)ASYP1-Y ALLOYS BY MBE [J].
FOXON, CT ;
JOYCE, BA ;
NORRIS, MT .
JOURNAL OF CRYSTAL GROWTH, 1980, 49 (01) :132-140
[3]   ION SURFACE INTERACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH BY SPUTTERING, MBE, AND PLASMA-ENHANCED CVD - APPLICATIONS TO SEMICONDUCTORS [J].
GREENE, JE ;
BARNETT, SA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02) :285-302
[4]   ION-SOLID INTERACTIONS DURING ION-BEAM DEPOSITION OF GE-74 AND SI-30 ON SI AT VERY LOW ION ENERGIES (0-200 EV RANGE) [J].
HERBOTS, N ;
APPLETON, BR ;
NOGGLE, TS ;
ZUHR, RA ;
PENNYCOOK, SJ .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :250-258
[5]   MOLECULAR-BEAM EPITAXY OF INP USING LOW-ENERGY P+ ION-BEAM [J].
MARUNO, S ;
MORISHITA, Y ;
ISU, T ;
NOMURA, Y ;
OGATA, H .
JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) :338-343
[6]   MOLECULAR-BEAM EPITAXY OF GAASXP1-X USING LOW-ENERGY P+ ION-BEAM [J].
MARUNO, S ;
MORISHITA, Y ;
ISU, T ;
NOMURA, Y ;
OGATA, H .
JOURNAL OF ELECTRONIC MATERIALS, 1988, 17 (01) :21-24
[7]   A SEMI-EMPIRICAL FORMULA FOR THE ENERGY-DEPENDENCE OF THE SPUTTERING YIELD [J].
MATSUNAMI, N ;
YAMAMURA, Y ;
ITIKAWA, Y ;
ITOH, N ;
KAZUMATA, Y ;
MIYAGAWA, S ;
MORITA, K ;
SHIMIZU, R .
RADIATION EFFECTS LETTERS, 1980, 57 (1-2) :15-21
[8]   MOLECULAR-BEAM EPITAXY OF GAP AND GAAS1-XPX [J].
MATSUSHIMA, Y ;
GONDA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1976, 15 (11) :2093-2101
[9]  
Monch W., 1985, Molecular Beam Epitaxy and Heterostructures. Proceedings of a NATO Advanced Study Institute, P105
[10]   THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].
SIGMUND, P .
PHYSICAL REVIEW, 1969, 184 (02) :383-+