SPUTTERING EXPERIMENTS WITH 1- TO 5-KEV AR+ IONS .2. MONOCRYSTALLINE TARGETS OF AL CU AND AU

被引：45

作者：

ROBINSON, MT

SOUTHERN, AL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1967年 / 38卷 / 07期

关键词：

D O I：

10.1063/1.1710034

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2969 / &

共 31 条

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