ATOM EJECTION IN LOW ENERGY SPUTTERING OF SINGLE CRYSTALS OF FCC METALS AND OF GE AND SI

被引：39

作者：

ANDERSON, GS

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1962年 / 33卷 / 06期

关键词：

D O I：

10.1063/1.1728886

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2017 / &

共 14 条

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[2]

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