ELECTRICAL-PROPERTIES OF PLATINUM-SILICON CONTACT ANNEALED IN AN H-2 AMBIENT

被引：31

作者：

MUTA, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1978年 / 17卷 / 06期

关键词：

D O I：

10.1143/JJAP.17.1089

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1089 / 1098

页数：10

共 23 条

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