NEW PRINCIPLE OF CONTACTLESS LIFETIME DETERMINATION IN SEMICONDUCTOR WAFERS

被引：8

作者：

HLAVKA, J

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1981年 / 52卷 / 01期

关键词：

D O I：

10.1063/1.1136447

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：60 / 62

页数：3

共 11 条

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