Low-temperature microwave measurements of both lattice-matched and pseudomorphic InxGa1-xAs/In0.52Al0.48As (x = 0.53, 0.60, and 0.70) channel MODFET's on InP substrates have been carried out in a cryogenic measurement system. The measurements were done in the temperature range of 77 to 300 K and in the frequency range of 0.5 to 11.0 GHz at different bias conditions. The cutoff frequency (fT) for the Inx.Ga1_ xAs/In0.52AI0.48As MODFET's improved from 22 to 29 GHz, 29 to 38 GHz, and 39 to 51 GHz, for x = 0.53, 0.60, and 0.70, respectively, as the temperature was lowered from 300 to 77 K, which is approximately a 31% increase at each composition, and no degradations were observed in device performance. These results indicate an excellent potential of the pseudomorphic devices at low temperatures. © 1990 IEEE