A SHALLOW JUNCTION SUBMICROMETER PMOS PROCESS WITHOUT HIGH-TEMPERATURE ANNEALS

被引:22
作者
CAREY, PG
WEINER, KH
SIGMON, TW
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D O I
10.1109/55.17838
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:542 / 544
页数:3
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