OPTIMIZATION OF THE GERMANIUM PREAMORPHIZATION CONDITIONS FOR SHALLOW-JUNCTION FORMATION

被引：83

作者：

OZTURK, MC

WORTMAN, JJ

OSBURN, CM

AJMERA, A

ROZGONYI, GA

FREY, E

CHU, WK

LEE, C

机构：

[1] MICROELECTR CTR N CAROLINA,RES TRIANGLE PK,NC 27709

[2] UNIV N CAROLINA,DEPT PHYS & ASTRON,CHAPEL HILL,NC 27514

[3] N CAROLINA STATE UNIV,DEPT MAT ENGN,RALEIGH,NC 27695

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 05期

关键词：

D O I：

10.1109/16.2510

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：659 / 668

页数：10

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