COMPARISON AND ANALYSIS OF PD-GAAS AND PT-GAAS SCHOTTKY DIODES FOR HYDROGEN DETECTION

被引:77
作者
KANG, WP
GURBUZ, Y
机构
[1] Solid-State Microelectronic Laboratory, Department of Electrical Engineering, Vanderbilt University, Nashville
关键词
D O I
10.1063/1.356517
中图分类号
O59 [应用物理学];
学科分类号
摘要
Hydrogen-sensing behaviors of Pd- and Pt-GaAs Schottky diodes, fabricated on the same GaAs substrate, have been systematically compared and analyzed as a function of hydrogen partial pressure and temperature by I-V and DELTAI-t methods under steady-state and transient conditions. The effects of hydrogen adsorption on the device parameters such as the barrier height and the ideality factor are investigated. The significant differences in their hydrogen sensing characteristics have been examined in terms of sensitivity limit, linearity of response, response rate, and response time. Adsorption activation energy of hydrogen and the heat of adsorption per hydrogen molecule on the surface of Pd and Pt are investigated and compared in both devices in a low-temperature range (27-100-degrees-C). For the temperature range investigated, Pd-GaAs shows better performance for H-2 detection than Pt-GaAs under the same testing conditions. The physical and chemical mechanisms responsible for hydrogen detection are discussed. Analysis of the steady-state reaction kinetics using I-V method confirmed that the atomistic hydrogen adsorption process is responsible for the barrier height change in the diodes.
引用
收藏
页码:8175 / 8181
页数:7
相关论文
共 21 条
  • [1] BARRIER HEIGHT AND LEAKAGE REDUCTION IN N-GAAS-PLATINUM GROUP METAL SCHOTTKY BARRIERS UPON EXPOSURE TO HYDROGEN
    ASPNES, DE
    HELLER, A
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03): : 602 - 607
  • [2] D'Amico A., 1983, Sensors and Actuators, V4, P349, DOI 10.1016/0250-6874(83)85043-4
  • [3] PD/ALPHA-SI-H METAL-INSULATOR-SEMICONDUCTOR SCHOTTKY-BARRIER DIODE FOR HYDROGEN DETECTION
    DAMICO, A
    FORTUNATO, G
    PETROCCO, G
    [J]. APPLIED PHYSICS LETTERS, 1983, 42 (11) : 964 - 965
  • [4] AN EXTREMELY SENSITIVE HETEROSTRUCTURE FOR PARTS PER MILLION DETECTION OF HYDROGEN IN OXYGEN
    FONASH, SJ
    LI, Z
    OLEARY, MJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (11) : 4415 - 4419
  • [5] A NEW HYDROGEN SENSOR BASED ON A PT/GAAS SCHOTTKY DIODE
    LECHUGA, LM
    CALLE, A
    GOLMAYO, D
    TEJEDOR, P
    BRIONES, F
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (01) : 159 - 162
  • [6] HYDROGEN SENSOR BASED ON A PT/GAAS SCHOTTKY DIODE
    LECHUGA, LM
    CALLE, A
    GOLMAYO, D
    BRIONES, F
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1991, 4 (3-4) : 515 - 518
  • [7] THE AMMONIA SENSITIVITY OF PT/GAAS SCHOTTKY-BARRIER DIODES
    LECHUGA, LM
    CALLE, A
    GOLMAYO, D
    BRIONES, F
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (06) : 3348 - 3354
  • [8] DIFFERENT CATALYTIC METALS (PT, PD AND IR) FOR GAAS SCHOTTKY-BARRIER SENSORS
    LECHUGA, LM
    CALLE, A
    GOLMAYO, D
    BRIONES, F
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1992, 7 (1-3) : 614 - 618
  • [9] HYDROGEN-SENSITIVE MOS FIELD-EFFECT TRANSISTOR
    LUNDSTROEM, I
    SHIVARAMAN, S
    SVENSSON, C
    LUNDKVIST, L
    [J]. APPLIED PHYSICS LETTERS, 1975, 26 (02) : 55 - 57
  • [10] HYDROGEN SENSITIVE MOS-STRUCTURES .1. PRINCIPLES AND APPLICATIONS
    LUNDSTROM, I
    [J]. SENSORS AND ACTUATORS, 1981, 1 (04): : 403 - 426