MONTE-CARLO CALCULATIONS OF BACKSCATTERED ELECTRONS AT REGISTRATION MARKS

被引：22

作者：

STEPHANI, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570284

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1739 / 1742

页数：4

共 9 条

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