HIGH-PRECISION AUTOMATIC ALIGNMENT PROCEDURE FOR VECTOR SCAN E-BEAM LITHOGRAPHY

被引：10

作者：

STEPHANI, D

FROSCHLE, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.569625

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The described automatic alignment procedure permits an alignment of two successive exposure levels of better than plus or minus 50 nm in a deflection field of 600 mu m at a beam current of 5 multiplied by 10** minus **1**0 A within an average time of 3 s even without using a laser interferometer controlled stage.

引用

页码：906 / 908

页数：3

共 7 条

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