OXIDANT TRANSPORT DURING STEAM OXIDATION OF SILICON

被引：20

作者：

MIKKELSEN, JC

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 11期

关键词：

D O I：

10.1063/1.92601

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：903 / 905

页数：3

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