CATHODIC ARC PLASMA DEPOSITION OF TIC AND TICXN1-X FILMS

被引:73
作者
RANDHAWA, H
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D O I
10.1016/0040-6090(87)90183-0
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:209 / 218
页数:10
相关论文
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