SURFACE AND IN-DEPTH ANALYSIS OF HYDROGENATED CARBON LAYERS ON SILICON AND GERMANIUM BY MASS AND ELECTRON-SPECTROSCOPY

被引：18

作者：

SANDER, P ^{[1
]}

ALTEBOCKWINKEL, M ^{[1
]}

STORM, W ^{[1
]}

WIEDMANN, L ^{[1
]}

BENNINGHOVEN, A ^{[1
]}

机构：

[1] UNIV MUNSTER,INST PHYS,D-4400 MUNSTER,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.584778

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：517 / 528

页数：12

共 58 条

[41]

NIR D, 1987, P EUR MATER SOC, V17, P313

[42] ELECTRON-SPECTROSCOPY STUDY OF HYDROGENATED AMORPHOUS-CARBON FILMS FORMED BY METHANE ION-BEAM DEPOSITION [J].

OELHAFEN, P ;

FREEOUF, JL ;

HARPER, JME ;

CUOMO, JJ .

THIN SOLID FILMS, 1984, 120 (03) :231-238

[43]

Olesinski R. W., 1984, B ALLOY PHASE DIAGR, V5, P484, DOI [10.1007/BF02872901, DOI 10.1007/BF02872901]

[44] EMPIRICAL FORMULA FOR CALCULATION OF SECONDARY ION YIELDS FROM OXIDIZED METAL-SURFACES AND METAL-OXIDES [J].

PLOG, C ;

WIEDMANN, L ;

BENNINGHOVEN, A .

SURFACE SCIENCE, 1977, 67 (02) :565-580

[45]

PLOG C, 1979, SECONDARY ION MASS S, P37

[46]

SAH RE, COMMUNICATION

[47]

SANDER P, 1987, P EUROPEAN MATERIALS, V17, P469

[48]

SANDER P, IN PRESS

[49]

SANDER P, 1986, J VAC SCI TECHNOL A, P295

[50] ION-BEAM-DEPOSITED POLYCRYSTALLINE DIAMONDLIKE FILMS [J].

SPENCER, EG ;

SCHMIDT, PH ;

JOY, DC ;

SANSALONE, FJ .

APPLIED PHYSICS LETTERS, 1976, 29 (02) :118-120

← 1 2 3 4 5 6 →