ENHANCED PLASMA OXIDATION AT LOW-TEMPERATURE USING A THIN SOLID ELECTROLYTE FILM

被引：20

作者：

GOURRIER, S

DIMITRIOU, P

THEETEN, JB

PERRIERE, J

SIEJKA, J

CROSET, M

机构：

[1] ECOLE NORM SUPER,GROUPE PHYS SOLIDES,F-75231 PARIS 5,FRANCE

[2] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 01期

关键词：

D O I：

10.1063/1.92116

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：33 / 35

页数：3

共 15 条

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[7] ANALYSIS OF PLASMA-GROWN GAAS OXIDE-FILMS [J].

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[8] AUGER SPECTROSCOPIC EVIDENCE THAT PLASMA ANODIZATION INVOLVES MASS-TRANSFER FROM CATHODE TO ANODE [J].

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