NON-EQUILIBRIUM WATER PERMEATION IN SIO2 THIN-FILMS

被引：12

作者：

PFEFFER, R ^{[1
]}

LUX, R ^{[1
]}

BERKOWITZ, H ^{[1
]}

LANFORD, WA ^{[1
]}

BURMAN, C ^{[1
]}

机构：

[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 06期

关键词：

D O I：

10.1063/1.331247

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：4226 / 4229

页数：4

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