MECHANICAL-PROPERTIES OF DIAMOND MEMBRANES

被引:13
作者
AIKAWA, Y
BABA, K
机构
[1] NEC Corporation, Fundamental Research Laboratories, Kanagawa, 216
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1993年 / 32卷 / 10期
关键词
DIAMOND FILM; MEMBRANE; FRACTURE STRENGTH; YOUNG MODULUS; BULGE TEST;
D O I
10.1143/JJAP.32.4680
中图分类号
O59 [应用物理学];
学科分类号
摘要
Polycrystalline diamond films were deposited using the hot-filament chemical vapor deposition method. The fracture strength for these membranes was estimated in a bulge test and from Young's modulus measurement. These mechanical properties are changed by the substrate pretreatment conditions, the methane concentration, and the dc bias application between filaments and substrate. The maximum fracture strength was achieved at 2200 MPa, when 700 mA dc bias current was applied. The main characteristics for this film are a small grain size (0.3 mum) with relatively low nondiamond carbon content. It is concluded that the mechanical properties for diamond film are greatly affected by both grain size and nondiamond content in the film.
引用
收藏
页码:4680 / 4683
页数:4
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