LOW-TEMPERATURE ION-BEAM MIXING OF MEDIUM-Z METALS

被引:38
作者
BORGESEN, P [1 ]
LILIENFELD, DA [1 ]
MSAAD, H [1 ]
机构
[1] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853
基金
美国国家科学基金会;
关键词
D O I
10.1016/0168-583X(91)95280-Q
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Low-temperature ion beam mixing of metals is generally ascribed to a combination of ballistic and thermal spike mechanisms. For heavy ions incident on sufficiently heavy metals the mixing rate varies much faster than linearly with the nuclear energy deposition density, epsilon, possibly quadratically as predicted by a model based on interdiffusion within overlapping thermal spikes. At lower energy densities the mixing rate still exceeds ballistic estimates significantly, but does not vary faster than linearly. Comparisons of results for medium-Z systems ranging from Pd-Ni to Al-Ti in this regime show that the same fundamental mixing mechanism must still be involved - a mechanism that is strongly sensitive to chemical driving forces, i.e., some type of "diffusion". The evidence for a thermal spike mechanism is considered.
引用
收藏
页码:563 / 566
页数:4
相关论文
共 28 条
[1]   ION-BEAM MIXING OF NI/PD LAYERS .1. CASCADE MIXING REGIME (LOW-TEMPERATURE) [J].
AKANO, UG ;
THOMPSON, DA ;
DAVIES, JA ;
SMELTZER, WW .
JOURNAL OF MATERIALS RESEARCH, 1988, 3 (06) :1057-1062
[2]   DEPTH RESOLUTION OF SPUTTER PROFILING [J].
ANDERSEN, HH .
APPLIED PHYSICS, 1979, 18 (02) :131-140
[4]   A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].
BIERSACK, JP ;
HAGGMARK, LG .
NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269
[5]  
BORGESEN P, 1989, J MATER RES, V4, P821
[6]  
BORGESEN P, 1990, APPL PHYS LETT, V57, P1407, DOI 10.1063/1.103449
[7]   ION-BEAM MIXING OF ALUMINUM AND TITANIUM [J].
BORGESEN, P ;
LILIENFIELD, DA ;
JOHNSON, HH .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (02) :513-519
[8]  
BORGESEN P, IN PRESS
[9]   ON LOW-TEMPERATURE ION-BEAM MIXING OF THIN MARKERS IN NICKEL [J].
BOTTIGER, J ;
NIELSEN, SK ;
THORSEN, PT .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :707-710
[10]  
Cheng Y T, 1989, NATO ASI SERIES, P191