LIQUID-PHASE EPITAXY OF INGAP ON GAAS (100) SUBSTRATES AT LOW GROWTH TEMPERATURES DOWN TO 630-DEGREES-C

被引:7
作者
KATO, T
MATSUMOTO, T
OGURA, H
机构
[1] Yamanashi University, Koju, 400
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 06期
关键词
LnGap; Lpe; Miscibility gap; Phase diagram; Photoluminescence;
D O I
10.1143/JJAP.29.L856
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaP layers were grown on GaAs (100) substrates by liquid phase epitaxy. The growth temperature (TG) was varied from 738 to 630°C. Layer qualities such as the surface morphology and photoluminescence characteristics were investigated. They became inferior with decreasing growth temperature when TG was lower than 700°C. The growth period required to grow a smooth surface was found to be shortened for TG's below 650°C. © 1990 The Japan Society of Applied Physics.
引用
收藏
页码:L856 / L859
页数:4
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