COMPARISON OF THEORETICAL-MODELS OF LASER ABLATION OF POLYIMIDE WITH EXPERIMENTAL RESULTS

被引：28

作者：

SINGLETON, DL ^{[1
]}

PARASKEVOPOULOS, G ^{[1
]}

TAYLOR, RS ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,DIV PHYS,OTTAWA K1A 0R6,ONTARIO,CANADA

来源：

CHEMICAL PHYSICS | 1990年 / 144卷 / 03期

关键词：

D O I：

10.1016/0301-0104(90)80108-A

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The results of detailed calculations of the etch rates for pulsed UV laser ablation of polyimide at 308 nm using several proposed theoretical models of the process are compared with experimental results. The theories which indicate that the etch depth per pulse is dependent on the fluence, and not the peak intensity of the laser pulse, are consistent with the experimental data for laser pulse widths of 7-500 ns. The implication of the results on various aspects of the models is discussed. © 1990.

引用

页码：415 / 423

页数：9

共 33 条

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