SURFACE AND BULK ANALYSIS OF METAL ORGANIC-CHEMICAL VAPOR DEPOSITION-DERIVED SUPERCONDUCTING TL2BA2CA2CU3OX THIN-FILMS BY AUGER-ELECTRON SPECTROSCOPY

被引：4

作者：

CILIBERTO, E

FRAGALA, IL

MALANDRINO, G

ALLEN, GC

YOUNES, CM

MARKS, TJ

RICHESON, DS

SCHULZ, DL

机构：

[1] NORTHWESTERN UNIV,SCI & TECHNOL CTR SUPERCONDUCT,DEPT CHEM,EVANSTON,IL 60208

[2] UNIV CATANIA,DIPARTIMENTO SCI CHIM,I-95125 CATANIA,ITALY

[3] UNIV BRISTOL,CTR INTERFACE ANAL,BRISTOL BS2 8BS,ENGLAND

来源：

THIN SOLID FILMS | 1992年 / 216卷 / 01期

关键词：

D O I：

10.1016/0040-6090(92)90865-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The surface and bulk chemical compositions of as-deposited and annealed superconducting Tl2Ba2Ca2Cu3Ox thin films have been analyzed by Auger electron spectroscopy (AES). These films are prepared on yttria-stabilized zirconia single-crystal substrates by a combination of metal-organic chemical vapor deposition (MOCVD) and thallium vapor diffusion. Ba-Ca-Cu-O films are first prepared by MOCVD. Thallium is then incorporated into these films by annealing in the presence of a mixture of oxides (Tl2O3, BaO, CaO and CuO) of a specific composition. The as-deposited Ba-Ca-Cu-O films are found to be free of carbon in the interior region. AES depth-profiling experiments reveal consistent atomic homogeneity throughout both the as-deposited Ba-Ca-Cu-O films and the Tl vapor-diffused superconducting films. Apparent intergrowth observed at the substrate-film interface may be due to surface roughness.

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页码：37 / 40

页数：4

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