ROTATING DEPOLARIZER ELLIPSOMETRY

被引:7
作者
HUNDERI, O [1 ]
机构
[1] UNIV TRONDHEIM,NORWEGIAN INST TECHNOL,DEPT PHYS MET,N-7034 TRONDHEIM,NORWAY
来源
APPLIED OPTICS | 1977年 / 16卷 / 11期
关键词
D O I
10.1364/AO.16.003012
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:3012 / 3015
页数:4
相关论文
共 6 条
[1]  
Aspnes D.E., 1976, OPTICAL PROPERTIES S
[2]   HIGH PRECISION SCANNING ELLIPSOMETER [J].
ASPNES, DE ;
STUDNA, AA .
APPLIED OPTICS, 1975, 14 (01) :220-228
[3]  
BEATTIE JR, 1955, PHILOS MAG, V46, P235
[4]   DESIGN AND OPERATION OF ETA, AN AUTOMATED ELLIPSOMETER [J].
HAUGE, PS ;
DILL, FH .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1973, 17 (06) :472-489
[5]  
MUELLER RH, 1976, SURF SCI, V56, P19
[6]   MODIFIED JONES CALCULUS FOR ANALYSIS OF ERRORS IN POLARIZATION-MODULATION ELLIPSOMETRY [J].
OHANDLEY, RC .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (05) :523-528