CHANGES IN THE SURFACE-COMPOSITION OF SI, TIO2, AND SIO2 INDUCED BY PULSED RUBY-LASER IRRADIATION

被引：1

作者：

BERMUDEZ, VM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期

关键词：

D O I：

10.1116/1.571447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：741 / 742

页数：2

共 8 条

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[8]

ZEHNER DM, UNPUB

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