LASER SURFACE-TREATMENT STUDIES IN ULTRAHIGH-VACUUM

被引：28

作者：

COWAN, PL ^{[1
]}

GOLOVCHENKO, JA ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期

关键词：

LASERS; -; Applications;

D O I：

10.1116/1.570638

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Q-switched lasers are potentially a useful tool for the preparation of surfaces in UHV for surface analysis. The (111), (110), and (100) faces of Si were investigated following various surface preparations including exposure to ruby laser pulses. Surface preparations involving laser irradiation were shown to have several advantages over other methods.

引用

页码：1197 / 1201

页数：5

共 17 条

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