SPIN-COATABLE INORGANIC RESISTS BASED ON NOVEL PEROXOPOLYNIOBOTUNGSTIC ACIDS FOR BILAYER LITHOGRAPHY

被引：36

作者：

KUDO, T

ISHIKAWA, A

OKAMOTO, H

MIYAUCHI, K

MURAI, F

MOCHIJI, K

UMEZAKI, H

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 10期

关键词：

D O I：

10.1149/1.2100252

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2607 / 2613

页数：7

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