REDUCTION OF THREADING DISLOCATIONS IN ISO-EPITAXIAL LAYERS GROWN ON (001) INP SUBSTRATES BY MISFIT STRESSES

被引：11

作者：

CHU, SNG ^{[1
]}

MAHAJAN, S ^{[1
]}

STREGE, KE ^{[1
]}

JOHNSTON, WD ^{[1
]}

BALLMAN, AA ^{[1
]}

机构：

[1] BELL TEL LABS INC,HOLMDEL,NJ 07733

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 10期

关键词：

D O I：

10.1063/1.92155

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：766 / 768

页数：3

共 20 条

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